Design, preparation and characterization of a double-ended symmetric MEMS thermopile with adiabatic grooves
Yihao Guan, Cheng Lei, Ting Liang, Yuehang Bai, Xuezhan Wu, Jijun Xiong, Kai Yin
Topics & Concepts
ThermopileThermocoupleMicroelectromechanical systemsAdiabatic processResponsivityMaterials scienceOhmic contactResponse timeInfraredOptoelectronicsOpticsComputer scienceNanotechnologyPhotodetectorComposite materialPhysicsThermodynamicsLayer (electronics)Computer graphics (images)Advanced Thermoelectric Materials and DevicesGas Sensing Nanomaterials and SensorsTransition Metal Oxide Nanomaterials