Temperature stability study of resonant angular scanning micromirrors with electrostatic comb-drive actuators
Yingchao Cao, Peng Wang, Jianhua Li, Huikai Xie
Topics & Concepts
Comb driveOpticsActuatorMaterials scienceResonance (particle physics)Frequency combInstabilityPhysicsMechanicsAtomic physicsFabricationElectrical engineeringLaserMedicinePathologyEngineeringAlternative medicineAdvanced MEMS and NEMS TechnologiesMechanical and Optical ResonatorsAdvanced Fiber Optic Sensors