Review of surface acoustic wave-based gas sensors
Qiming Yang, Baile Cui, Jing Jin, Lina Cheng, Xufeng Xue, Yining Yin, Wen Wang
Abstract
Surface acoustic wave (SAW) gas-based sensors have attracted significant attention as an emerging sensing technology due to their unique micro/nano-scale acoustic sensing structures and multi-physical field coupling mechanisms, which feature high sensitivity, rapid response, wide detection range, and lightweight. This paper systematically reviews the SAW propagation in layered media, gas sensing mechanisms, sensing device design and fabrication, signal acquisition and processing circuits. Potential applications in fields such as renewable energy, aerospace, defense, industrial control, and intelligent manufacturing are also discussed, followed by an outlook on future development trends.