Room temperature NO2 gas sensor based on stain-etched porous silicon: Towards a low-cost gas sensor integrated on silicon
H. Mhamdi, Khawla Azaiez, T. Fiorido, R. Benabderrahmane Zaghouani, J.‐L. Lazzari, Marc Bendahan, W. Dimassi
Topics & Concepts
SiliconPublicsPorous siliconLibrary sciencePolitical scienceMaterials scienceHumanitiesComputer scienceArtOptoelectronicsLawPoliticsGas Sensing Nanomaterials and SensorsAnalytical Chemistry and SensorsTransition Metal Oxide Nanomaterials