Hybrid deposition of Cr–O/Al–O hard coatings combining cathodic arc evaporation and high power impulse magnetron sputtering
Dongsen Geng, Yu X. Xu, Qimin Wang
Topics & Concepts
High-power impulse magnetron sputteringMaterials sciencePhysical vapor depositionCoatingSputter depositionCathodeMetallurgyCathodic arc depositionEvaporationSputteringAnalytical Chemistry (journal)Composite materialCathodic protectionThin filmAnodeNanotechnologyElectrodeChemistryPhysicsChromatographyThermodynamicsPhysical chemistryMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchHigh-Temperature Coating Behaviors