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Design and fabrication of blazed gratings for a waveguide-type head mounted display

Marie‐Aline Mattelin, A. Radosavljević, Jeroen Missinne, Dieter Cuypers, Geert Van Steenberge

2020Optics Express54 citationsDOIOpen Access PDF

Abstract

In a waveguide-type display for augmented reality, the image is injected in the waveguide and extracted in front of the eye appearing superimposed on the real-world scene. An elegant and compact way of coupling these images in and out is by using blazed gratings, which can achieve high diffraction efficiencies. We report the design of blazed gratings for green light (λ = 543 nm) and a diffraction angle of 43°. The blazed gratings with a pitch of 508 nm and a fill factor of 0.66 are fabricated using grayscale electron beam lithography. We outline the subsequent replication in a polymer waveguide material with ultraviolet nanoimprint lithography and confirm a throughput efficiency of 17.4%. We finally show the in- and outcoupling of an image through two blazed gratings appearing sharp and non-distorted in the environment.

Topics & Concepts

OpticsNanoimprint lithographyMaterials scienceLithographyDiffraction efficiencyElectron-beam lithographyDiffraction gratingFabricationWaveguideOptoelectronicsDiffractionViewing angleGratingBlazed gratingResistPhysicsLiquid-crystal displayLayer (electronics)NanotechnologyMedicineAlternative medicinePathologyNanofabrication and Lithography TechniquesPhotonic and Optical DevicesAdvanced Optical Imaging Technologies
Design and fabrication of blazed gratings for a waveguide-type head mounted display | Litcius