The evolution of preferred orientation and morphology of AlN films under various sputtering parameters
Zhaoxuan Wei, Longhai Shen, Ye Chow Kuang, Jian Wang, Guoliang Yang, Weiwei Lei
Topics & Concepts
Materials scienceWurtzite crystal structureSputteringWaferSubstrate (aquarium)Sputter depositionMorphology (biology)Orientation (vector space)NitrideIndium nitrideDeposition (geology)OptoelectronicsCrystallographyComposite materialThin filmChemistryNanotechnologyMetallurgyGeometryLayer (electronics)ZincOceanographyPaleontologyBiologyGeologyGeneticsMathematicsSedimentAcoustic Wave Resonator TechnologiesGaN-based semiconductor devices and materialsMetal and Thin Film Mechanics