A MEMS capacitive vacuum pressure sensor featuring dual sealed cavities
Gang Li, Tao Xu, Huzhong Zhang, Zhenhua Xi, Wenze Tao, Wenjie Jia, Deyan He, Xiaodong Han
Topics & Concepts
Capacitive sensingMicroelectromechanical systemsDual (grammatical number)Materials scienceOptoelectronicsPressure sensorElectrical engineeringMechanical engineeringEngineeringArtLiteratureAdvanced MEMS and NEMS TechnologiesPlasma Diagnostics and ApplicationsMechanical and Optical Resonators