Effect of thickness on infrared optical property of VO2 film deposited by magnetron sputtering
Zhenhuai Yang, Qiuling Yang, Lei Yang, Bing Dai, Fei Xia, Peng Wang, Shuai Guo, Gang Gao, Liangge Xu, YuMin Zhang, Jiaqi Zhu
Topics & Concepts
Materials scienceRaman spectroscopyTransmittanceSapphireSputter depositionInfraredAnalytical Chemistry (journal)Thin filmSputteringDeposition (geology)SpectroscopyOptoelectronicsOpticsChemistryLaserNanotechnologyBiologyChromatographyPaleontologySedimentQuantum mechanicsPhysicsTransition Metal Oxide NanomaterialsGa2O3 and related materialsGas Sensing Nanomaterials and Sensors