Structural, optical, and electrical properties of TiO2 thin films deposited by ALD: Impact of the substrate, the deposited thickness and the deposition temperature
Aline Jolivet, Christophe Labbé, Cédric Frilay, Olivier Debieu, P. Marié, Bryan Horcholle, Franck Lemarié, X. Portier, C. Grygiel, Sylvain Duprey, Wojciech M. Jadwisienczak, David Ingram, Mudit Upadhyay, Adrian David, Arnaud Fouchet, Ulrike Lüders, Julien Cardin
Topics & Concepts
Substrate (aquarium)Deposition (geology)Materials scienceThin filmAtomic layer depositionChemical engineeringComposite materialOptoelectronicsNanotechnologyGeologyEngineeringPaleontologySedimentOceanographySemiconductor materials and devicesZnO doping and propertiesElectronic and Structural Properties of Oxides