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Fractal analysis on the surface topography of Monocrystalline silicon wafers sawn by diamond wire

Tengyun Liu, Peirong Zhang, Yancai Su, Yujing Sun

2024Materials Science in Semiconductor Processing14 citationsDOI

Topics & Concepts

Monocrystalline siliconMaterials scienceWaferDiamondFractal analysisSiliconSurface (topology)Composite materialFractalDiamond toolMetallurgyOptoelectronicsGeometryFractal dimensionDiamond turningMathematical analysisMathematicsAdvanced Surface Polishing TechniquesSurface Roughness and Optical MeasurementsAdhesion, Friction, and Surface Interactions
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