Impact of channel thickness on device scaling in vertical InGaZnO channel charge-trap memory transistors with ALD Al2O3 tunneling layer
Yun-Ju Cho, Young-Ha Kwon, Nak‐Jin Seong, Kyu-Jeong Choi, Chi‐Sun Hwang, Sung‐Min Yoon
Topics & Concepts
Materials scienceTrap (plumbing)Quantum tunnellingOptoelectronicsScalingChannel (broadcasting)Layer (electronics)Charge (physics)TransistorNanotechnologyElectrical engineeringVoltagePhysicsGeometryQuantum mechanicsMeteorologyEngineeringMathematicsThin-Film Transistor TechnologiesSemiconductor materials and devicesAdvancements in Semiconductor Devices and Circuit Design