High-performance ethanol sensor based on In2O3 nanospheres grown on silicon nanoporous pillar array
Wenliang Zhu, Tingting Xu, Weikang Liu, Wenchuang Wang, Minghai Feng, Yan Cheng, Ying Li, Yongtao Tian, Xinjian Li
Topics & Concepts
NanoporousMaterials scienceHeterojunctionScanning electron microscopeNanostructureSiliconLayer (electronics)Thermal oxidationOptoelectronicsNanotechnologyChemical engineeringEvaporationComposite materialThermodynamicsPhysicsEngineeringGas Sensing Nanomaterials and SensorsAnalytical Chemistry and SensorsAdvanced Chemical Sensor Technologies