Thermal damage free material processing using femtosecond laser pulses for fabricating fine metal masks: Influences of laser fluence and pulse repetition rate on processing quality
S. Shin, Jun-Gyu Hur, Jong Kab Park, Doh-Hoon Kim
Topics & Concepts
Materials scienceFluenceFemtosecondLaserOpticsIrradiationPenetration depthThermalOptoelectronicsMeteorologyPhysicsNuclear physicsLaser Material Processing TechniquesLaser-induced spectroscopy and plasmaOcular and Laser Science Research