Impact of methane concentration on surface morphology and boron incorporation of heavily boron-doped single crystal diamond layers
Rozita Rouzbahani, Shannon S. Nicley, Danny E. P. Vanpoucke, Fernando Lloret, Paulius Pobedinskas, D. Araújo, Ken Haenen
Topics & Concepts
BoronDiamondMaterials scienceMethaneAdsorptionDopingElectron mobilityElectrical resistivity and conductivityChemical vapor depositionImpurityCrystal (programming language)ConductivityAnalytical Chemistry (journal)NanotechnologyChemistryPhysical chemistryMetallurgyOrganic chemistryOptoelectronicsComputer scienceProgramming languageElectrical engineeringEngineeringDiamond and Carbon-based Materials ResearchSemiconductor materials and devicesElectronic and Structural Properties of Oxides