Chemical mechanical polishing of silicon carbide (SiC) based on coupling effect of ultrasonic vibration and catalysis
Gaopan Chen, Liyan Pan, Haimei Luo, Yan Zhou, Guihai Luo, Guoshun Pan, Guoshun Pan
Topics & Concepts
PolishingMaterials scienceUltrasonic sensorChemical-mechanical planarizationCatalysisSilicon carbideSurface roughnessSlurryComposite materialCoupling (piping)Chemical engineeringAnalytical Chemistry (journal)OptoelectronicsChemistryAcousticsOrganic chemistryPhysicsEngineeringAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchAdvanced ceramic materials synthesis