Improvement in dispersion stability of alumina suspensions and corresponding chemical mechanical polishing performance
Wantang Wang, Baoguo Zhang, Yunhui Shi, D. K. Zhou, Ru Wang
Topics & Concepts
DispersantDispersion stabilityZeta potentialChemical engineeringMaterials scienceDispersion (optics)DispersitySuspension (topology)Polyethylene glycolAdsorptionPEG ratioViscosityParticle sizeComposite materialPolymer chemistryChemistryNanoparticleNanotechnologyOrganic chemistryPolymerHomotopyMathematicsFinancePure mathematicsEconomicsOpticsEngineeringPhysicsAdvanced Surface Polishing TechniquesAdvanced ceramic materials synthesisSemiconductor materials and devices