Field dependent study on the impact of co-evaporated multihits and ion pile-up for the apparent stoichiometric quantification of GaN and AlN
R. J. H. Morris, Ramya Cuduvally, Jhao-Rong Lin, Ming Zhao, Wilfried Vandervorst, Mattias Thuvander, Claudia Fleischmann
Topics & Concepts
IonAtom probeEvaporationPileStoichiometryMaterials scienceElectrodeField (mathematics)NitrideAnalytical Chemistry (journal)ChemistryChemical physicsComposite materialPhysicsPhysical chemistryGeologyMicrostructureThermodynamicsOrganic chemistryChromatographyGeotechnical engineeringPure mathematicsLayer (electronics)MathematicsAdvanced Materials Characterization TechniquesDiamond and Carbon-based Materials ResearchMetal and Thin Film Mechanics