Hybrid HIPIMS+MFMS power supply for dual magnetron sputtering systems
В.О. Оскирко, А. Н. Захаров, А.П. Павлов, А.А. Solovyev, V. A. Semenov, С. В. Работкин
Topics & Concepts
High-power impulse magnetron sputteringSputter depositionMaterials scienceCavity magnetronOptoelectronicsImpulse (physics)SputteringPower (physics)Electronic engineeringElectrical engineeringEngineeringThin filmPhysicsNanotechnologyQuantum mechanicsMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchSemiconductor materials and devices