Mg doping effects on the microstructure and piezoelectric characteristics of ZnO:Li films deposited at room temperature using an RF sputtering deposition method
Cheng-Ying Li, Zehui Chen, Cheng‐Che Tsai, Sheng‐Yuan Chu
Topics & Concepts
Materials scienceMicrostructureDopingDeposition (geology)SputteringSputter depositionPiezoelectricityThin filmComposite materialChemical engineeringOptoelectronicsAnalytical Chemistry (journal)NanotechnologyEnvironmental chemistryEngineeringBiologyPaleontologyChemistrySedimentZnO doping and propertiesAcoustic Wave Resonator TechnologiesGas Sensing Nanomaterials and Sensors