Integrated fabrication of micro/nano-fluidic chip based on nano-imprint lithography and bonding
Ran Zhang, Da Huang, Yuanyi Fan, Xiao Liu, Ze Liu, Jinkui Chu
Abstract
Abstract In order to achieve high-efficiency and high-precision fabrication of nanochannels in micro/nano-fluidic devices, a new method for integrating nano-imprint lithography manufacturing nano-channels and polydimethylsiloxane (PDMS) microchannels with silicon nitride as a bonding layer is proposed. Nanoimprint technology has the advantages of high-precision replication of the template nano-groove size and the ability to form a large number of channels at one time. By depositing silicon nitride on the surface of the nano-trench to improve its bonding force with PDMS treated with oxygen plasma, the bonding strength can withstand pressures above 0.3 MPa. The accuracy of making nanochannels with a characteristic size of 100 nm in this solution can reach more than 95%. Fluorescence experiments using this device show that the device has better enrichment capacity, and its mechanism can be explained by the size exclusion enrichment effect.