Experimental research on surface characteristics and subsurface damage behavior of monocrystal sapphire induced by helical micro abrasive tools
Siqian Gong, Xiaomin Zhu, Yao Sun, Benjia Tang, Zhipeng Su
Topics & Concepts
SapphireMaterials scienceAbrasiveGrindingSurface roughnessEtching (microfabrication)Surface integrityEnhanced Data Rates for GSM EvolutionComposite materialIsotropic etchingCorrosionLayer (electronics)MetallurgyOpticsLaserComputer scienceTelecommunicationsPhysicsAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationLaser Material Processing Techniques