Sintering of Cu nanoparticles for optimized particle size and enhanced interconnect performance
Ping-Hsuan Chen, Hung Wang, Kelvin Li, Chang-Meng Wang, Cheng‐Yi Liu, Albert T. Wu
Topics & Concepts
SinteringMaterials scienceNanoparticleInterconnectionParticle sizeParticle (ecology)Chemical engineeringNanotechnologyMetallurgyComputer scienceTelecommunicationsGeologyOceanographyEngineeringElectronic Packaging and Soldering Technologies3D IC and TSV technologiesCopper Interconnects and Reliability