Magnetron sputtering process for deposition of multilayered thin diamond-like carbon films with silver nanoparticles for anti-reflective coatings and refractometric sensing
Aušrinė Jurkevičiūtė, Paulius Dolmantas, Andrius Vasiliauskas, Asta Tamulevičienė, Šarūnas Meškinis, Raimonds Popļausks, Juris Prikulis, Sigitas Tamulevičius, Tomas Tamulevičius
Topics & Concepts
Materials scienceSputter depositionThin filmDeposition (geology)Diamond-like carbonCarbon filmCavity magnetronArgonSputteringSiliconNanotechnologyOptoelectronicsChemistryBiologyOrganic chemistrySedimentPaleontologyDiamond and Carbon-based Materials ResearchGraphene research and applicationsMetal and Thin Film Mechanics