Effect of annealing on the structural, optical and surface properties of chromium oxide (Cr2O3) thin films deposited by e-beam evaporation for plasma etching applications
Huseyin Ekinci, Mohammad Soltani, Navid M. S. Jahed, Xiaoli Zhu, Bo Cui, D. A. Pushin
Topics & Concepts
Materials scienceCrystalliteX-ray photoelectron spectroscopyAmorphous solidThin filmAnalytical Chemistry (journal)Annealing (glass)SiliconOxideChemical engineeringComposite materialMetallurgyCrystallographyNanotechnologyChemistryEngineeringChromatographyZnO doping and propertiesCopper-based nanomaterials and applicationsGa2O3 and related materials