Magnetron sputtering method for the preparation of Cu-ZrB2 composite film and their optical properties
Yijing Wu, Junjie Pan, Xiaoli Fan, Qiuhang Lu, Yun Gong, Xianli Huang, Kun Chang, Tao Wang, Jianping He
Topics & Concepts
Materials scienceComposite numberSputter depositionSputteringCavity magnetronComposite materialThin filmOptoelectronicsOpticsNanotechnologyPhysicsIntermetallics and Advanced Alloy PropertiesMetal and Thin Film MechanicsAdvanced materials and composites