Abrasive mechanisms and interfacial mechanics of amorphous silicon carbide thin films in chemical-mechanical planarization
Van-Thuc Nguyen, Te‐Hua Fang
Topics & Concepts
AbrasiveChemical-mechanical planarizationMaterials scienceSilicon carbideAmorphous solidComposite materialPolishingSubstrate (aquarium)DiamondLayer (electronics)SiliconStress (linguistics)CarbideMetallurgyCrystallographyGeologyLinguisticsPhilosophyChemistryOceanographyAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchMetal and Thin Film Mechanics