Capacitance Response of Concave Well Substrate MEMS Double Touch Mode Capacitive Pressure Sensor: Robust Design, Theoretical Modeling, Numerical Simulation and Performance Comparison
Guru Aathavan Alagu Uthaya Kumar, Sumit Kumar Jindal, P. K. Sreekanth
Topics & Concepts
Capacitive sensingMicroelectromechanical systemsMaterials sciencePressure sensorCapacitanceLinearitySensitivity (control systems)MATLABDeflection (physics)AcousticsElectronic engineeringComputer scienceOptoelectronicsMechanical engineeringOpticsEngineeringPhysicsOperating systemQuantum mechanicsElectrodeAdvanced MEMS and NEMS TechnologiesAdvanced Sensor and Energy Harvesting MaterialsAcoustic Wave Resonator Technologies