Surface microtopography evolution of monocrystalline silicon in chemical mechanical polishing
Ke Yang, Hongyu Di, Ning Huang, Changyu Hou, Ping Zhou
Topics & Concepts
PolishingMonocrystalline siliconSurface roughnessMaterials scienceChemical-mechanical planarizationSurface finishSiliconComposite materialChemical physicsOpticsMetallurgyChemistryPhysicsAdvanced Surface Polishing TechniquesForce Microscopy Techniques and ApplicationsSurface Roughness and Optical Measurements