Ultralow detection limit MEMS hydrogen sensor based on SnO2 with oxygen vacancies
Na Luo, Chen Wang, Dan Zhang, Mengmeng Guo, Xiaohong Wang, Zhixuan Cheng, Jiaqiang Xu
Topics & Concepts
OxygenMaterials scienceAnnealing (glass)HydrogenNanotechnologyOxideMicroelectromechanical systemsVacancy defectOptoelectronicsChemical engineeringChemistryComposite materialMetallurgyCrystallographyEngineeringOrganic chemistryGas Sensing Nanomaterials and SensorsAnalytical Chemistry and SensorsAdvanced Chemical Sensor Technologies