A novel process of chemical mechanical polishing for FV520B steel
Longxing Liao, Zhenyu Zhang, Jie Liu, Yubiao Li, Xiangxiang Cui, Lu Liu
Topics & Concepts
Materials sciencePolishingSlurryChemical-mechanical planarizationSurface roughnessSurface finishAbrasion (mechanical)Composite materialDegreasingSiliconeHydrogen peroxideProcess (computing)DissolutionMetallurgyChemical engineeringComputer scienceOperating systemChemistryOrganic chemistryEngineeringAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationAdvanced Machining and Optimization Techniques