Anisotropic/Isotropic Atomic Layer Etching of Metals
Doo San Kim, Ju Eun Kim, You Jung Gill, Yun Jong Jang, Ye Eun Kim, Kyong Nam Kim, Geun Young Yeom, Dong Woo Kim
Topics & Concepts
IsotropyEtching (microfabrication)Materials scienceAnisotropyLayer (electronics)Composite materialOpticsPhysicsSemiconductor materials and devicesAdvanced Memory and Neural ComputingElectronic and Structural Properties of Oxides