Structure, composition and mechanical properties of reactively sputtered (TiVCrTaW)Nx high-entropy films
Yuchun Tu, Xuan Liu, Jiaoling Zhao, Yanyan Yuan, Benyuan Cheng, Xie Zhiyong, Junjian Ye, Wei Wang, Xiuguang Huang, Sizu Fu
Topics & Concepts
Materials scienceMicrostructureAlloyNitrideNitrogenSputter depositionArgonStoichiometrySputteringWaferHigh entropy alloysComposite materialAnalytical Chemistry (journal)Thin filmChemistryNanotechnologyPhysical chemistryLayer (electronics)Organic chemistryChromatographyMetal and Thin Film MechanicsHigh Entropy Alloys StudiesDiamond and Carbon-based Materials Research