Optical emission spectroscopy study of plasma parameters in low-pressure hollow cathode plasma jet and planar magnetron powered by DC and pulsed DC supply
Himanshu Mishra, M. Tichý, P. Kudrna
Topics & Concepts
Pulsed DCPlasmaCathodeMaterials scienceCavity magnetronPlanarSpectroscopyJet (fluid)Atomic physicsOptoelectronicsPhysicsSputter depositionChemistryThin filmNanotechnologyMechanicsQuantum mechanicsPhysical chemistrySputteringComputer graphics (images)Computer sciencePlasma Diagnostics and ApplicationsPlasma Applications and DiagnosticsElectrohydrodynamics and Fluid Dynamics