Enhanced electrical properties of ZrO2-TiN based capacitors by introducing ultrathin metal oxides
Dong-Kwon Lee, Hyo‐Bae Kim, Se‐Hun Kwon, Ji‐Hoon Ahn
Topics & Concepts
Materials scienceCapacitorTinElectrodeDielectricHigh-κ dielectricOptoelectronicsOxideEquivalent oxide thicknessNanotechnologyVoltageMetallurgyElectrical engineeringTransistorGate oxidePhysical chemistryChemistryEngineeringSemiconductor materials and devicesFerroelectric and Negative Capacitance DevicesCopper Interconnects and Reliability