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Design and realization of sculpture-shaped ciliary MEMS vector hydrophone

Peng Chen, Guojun Zhang, Xi Yang, Songxiang Ji, Xiaoqi Liang, Ting Lv, Xiaoyong Zhang, Shan Zhu, Zhenzhen Shang, Wendong Zhang

2021Sensors and Actuators A Physical20 citationsDOI

Topics & Concepts

HydrophoneSensitivity (control systems)AcousticsDirectivityMicroelectromechanical systemsFrequency bandOpticsNoise (video)Beam (structure)SIGNAL (programming language)PhysicsMaterials scienceAntenna (radio)EngineeringElectrical engineeringComputer scienceElectronic engineeringOptoelectronicsArtificial intelligenceProgramming languageImage (mathematics)Underwater Acoustics ResearchUnderwater Vehicles and Communication SystemsFlow Measurement and Analysis
Design and realization of sculpture-shaped ciliary MEMS vector hydrophone | Litcius