Litcius/Paper detail

Subsurface damage and bending strength analysis for ultra-thin and flexible silicon chips

Jian Wei, ZhaoXian Wang, Peng Jin, LongJi Zhu, Ying Chen, Xue Feng

2022Science China Technological Sciences19 citationsDOI

Topics & Concepts

Materials scienceGrindingBendingComposite materialPolishingRotational speedEtching (microfabrication)Mechanical engineeringLayer (electronics)EngineeringAdvanced Surface Polishing TechniquesNanowire Synthesis and ApplicationsForce Microscopy Techniques and Applications