High-speed observation of pulse energy and pulse width dependences of damage generation in SiC during ultrashort pulse laser drilling
Junya Hattori, Yusuke Ito, Hiroshi Jo, Keisuke Nagato, Naohiko Sugita
Topics & Concepts
Ultrashort pulsePulse (music)Materials scienceLaserOpticsSilicon carbideMultiphoton intrapulse interference phase scanBandwidth-limited pulseUltrashort pulse laserFemtosecond pulse shapingPulse-width modulationOptoelectronicsComposite materialPhysicsQuantum mechanicsDetectorVoltageLaser Material Processing TechniquesAdvanced Surface Polishing TechniquesIntegrated Circuits and Semiconductor Failure Analysis