Domain-adaptive active learning for cost-effective virtual metrology modeling
Jaewoong Shim, Seokho Kang
Topics & Concepts
MetrologyComputer scienceSemiconductor device fabricationDomain (mathematical analysis)Process (computing)Active learning (machine learning)WaferArtificial intelligenceMachine learningEngineeringMathematicsElectrical engineeringStatisticsMathematical analysisOperating systemDomain Adaptation and Few-Shot LearningMachine Learning and AlgorithmsMachine Learning and ELM