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Enhanced stability and mobility of solution-processed oxide thin-film transistors with bilayer terbium-incorporated indium oxide channel

Penghui He, Chunchun Ding, Xuming Zou, Guoli Li, Wei Hu, Chao Ma, Denis Flandre, Benjamı́n Iñı́guez, Lei Liao, Linfeng Lan, Xingqiang Liu

2022Applied Physics Letters36 citationsDOIOpen Access PDF

Abstract

The trade-off between mobility and stability in oxide thin-film transistors (TFTs) hinders further advances of an active-matrix flat panel display. Herein, a solution-processed bilayer active channel is designed to improve the stability and mobility simultaneously. The optical bandgap and work function of Tb:In2O3 films are modulated by tuning the film thickness and Tb concentration of Tb-doped indium oxide (Tb:In2O3) films. Large conduction band offset is achieved in a Tb:In2O3 bilayer channel, which induces accumulation of abundant electrons at the interface. The mobility is significantly improved to 38.2 cm2/V s, and the photoinduced stability of bilayer Tb:In2O3 TFTs is improved with low threshold voltage shift of 0.26 and −0.38 V under negative-bias illumination stress and negative-bias temperature illumination stress, respectively.

Topics & Concepts

Materials scienceThin-film transistorBilayerOptoelectronicsOxideIndiumElectron mobilityThin filmTransistorActive matrixThreshold voltageTerbiumNanotechnologyLayer (electronics)VoltageChemistryMembraneElectrical engineeringLuminescenceEngineeringMetallurgyBiochemistryThin-Film Transistor TechnologiesZnO doping and propertiesSemiconductor materials and devices
Enhanced stability and mobility of solution-processed oxide thin-film transistors with bilayer terbium-incorporated indium oxide channel | Litcius