Examining amino acids as environmentally friendly corrosion inhibitors for Cu and Co chemical mechanical planarization
Thi Thuy Hoang Tran, Juster Gichovi, Julia Commane, Elizabeth J. Podlaha, Jihoon Seo
Topics & Concepts
Chemical-mechanical planarizationEnvironmentally friendlyCorrosionChemistryCorrosion inhibitorCombinatorial chemistryMaterials scienceOrganic chemistryLayer (electronics)BiologyEcologyAdvanced Surface Polishing TechniquesMetal and Thin Film MechanicsDiamond and Carbon-based Materials Research