Structural, electronic, and magnetic properties of Co4N thin films deposited using HiPIMS
Seema Seema, Akhil Tayal, S. M. Amir, Sabine Pütter, Stefan Mattauch, Mukul Gupta
Topics & Concepts
High-power impulse magnetron sputteringMaterials scienceThin filmWurtzite crystal structureCrystalliteSputter depositionNitrideAnalytical Chemistry (journal)NanotechnologySputteringChemistryMetallurgyLayer (electronics)ZincChromatographyMetal and Thin Film MechanicsZnO doping and propertiesDiamond and Carbon-based Materials Research