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Simultaneous etching of underlying metal oxide and sulfide thin films during Cu2S atomic layer deposition

Raphael Edem Agbenyeke, Seong Ho Han, Bo Keun Park, Taek‐Mo Chung, Young Kuk Lee, Chang Gyoun Kim, Jeong Hwan Han

2020Applied Surface Science13 citationsDOI

Topics & Concepts

Atomic layer depositionEtching (microfabrication)OxideMaterials scienceMetalSulfideChemical engineeringLayer (electronics)Thin filmInorganic chemistryChemistryNanotechnologyMetallurgyEngineeringZnO doping and propertiesCopper-based nanomaterials and applicationsSemiconductor materials and devices
Simultaneous etching of underlying metal oxide and sulfide thin films during Cu2S atomic layer deposition | Litcius