Modeling and application of Czochralski silicon single crystal growth process using hybrid model of data-driven and mechanism-based methodologies
Jun-Chao Ren, Ding Liu, Yin Wan
Topics & Concepts
Robustness (evolution)Control theory (sociology)OutlierOnline modelComputer scienceNonlinear systemField (mathematics)AlgorithmMaterials scienceArtificial intelligenceMathematicsControl (management)PhysicsPure mathematicsBiochemistryQuantum mechanicsStatisticsGeneChemistryAdvanced Control Systems OptimizationIterative Learning Control SystemsFault Detection and Control Systems