A fast boundary-finite element approach for estimating anchor losses in Micro-Electro-Mechanical System resonators
A. Aimi, Luca Desiderio, Patrick Fedeli, Attilio Frangi
Topics & Concepts
ResonatorFinite element methodBoundary element methodBoundary value problemBoundary (topology)DissipationCollocation (remote sensing)Matrix (chemical analysis)AcousticsComputer scienceEngineeringPhysicsStructural engineeringMathematicsMaterials scienceMathematical analysisElectrical engineeringComposite materialMachine learningThermodynamicsAdvanced MEMS and NEMS TechnologiesAdvanced Fiber Optic SensorsMechanical and Optical Resonators