A miniature laser diode interferometer with self-compensation of retroreflector’s motion errors for displacement feedback of small-sized micro/nano motion stages
Yindi Cai, Bo Xie, Zhixiang Wen, Kuang–Chao Fan
Topics & Concepts
RetroreflectorDisplacement (psychology)Laser diodeOpticsCompensation (psychology)InterferometryDiodeNano-LaserPhysicsMaterials scienceOptoelectronicsPsychoanalysisPsychologyPsychotherapistQuantum mechanicsAdvanced Measurement and Metrology TechniquesAdvanced Fiber Optic SensorsPhotonic and Optical Devices