Efficient and stable CF<sub>4</sub> decomposition over θ-Al<sub>2</sub>O<sub>3</sub> with extraordinary resistance to HF
Hang Zhang, Kang Liu, yingkang chen, Xiaojian Wang, Hongmei Li, Junwei Fu, Liyuan Chai, Zhang Lin, Min Liu
Abstract
Regulating Al 2 O 3 to θ phase is an effective method for enhancing the stability of CF 4 decomposition.
Topics & Concepts
DecompositionStability (learning theory)Phase (matter)Materials scienceMathematicsChemistryPhysicsComputer scienceQuantum mechanicsOrganic chemistryMachine learningInorganic Fluorides and Related CompoundsFluoride Effects and RemovalEsophageal and GI Pathology