Sputter deposition with powder targets: An overview
Diederik Depla
Topics & Concepts
SputteringMaterials scienceImpurityDeposition (geology)Sputter depositionFlexibility (engineering)Yield (engineering)NanotechnologyProcess engineeringThin filmEngineering physicsMetallurgyChemistryGeologyPhysicsEngineeringPaleontologyOrganic chemistrySedimentMathematicsStatisticsMetal and Thin Film MechanicsZnO doping and propertiesHigh-Temperature Coating Behaviors