Effect of Si content on the thermal stability and oxidation resistance of arc-deposited TiAlSiN films with cubic structure
Jin Gu, Jie Zhang, Li Chen, Chun Hu
Topics & Concepts
Materials scienceThermal stabilityArc (geometry)Chemical engineeringContent (measure theory)MetallurgyMechanical engineeringMathematicsMathematical analysisEngineeringMetal and Thin Film MechanicsGaN-based semiconductor devices and materialsAdvanced ceramic materials synthesis