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Design and analysis of a RF MEMS shunt switch using U-shaped meanders for low actuation voltage

G. Shanthi, K. Srinivasa Rao, K. Girija Sravani

2020Microsystem Technologies20 citationsDOI

Topics & Concepts

CapacitanceInsertion lossMicroelectromechanical systemsElectrical engineeringMaterials scienceVoltageShunt (medical)OptoelectronicsLow voltageDielectricAcousticsEngineeringPhysicsElectrodeQuantum mechanicsCardiologyMedicineAdvanced MEMS and NEMS TechnologiesAcoustic Wave Resonator TechnologiesMechanical and Optical Resonators
Design and analysis of a RF MEMS shunt switch using U-shaped meanders for low actuation voltage | Litcius